Диффузное рассеяние рентгеновского излучения
Off specular X-ray scattering

Off specular X-ray scattering is an important source of information about the structure of matter
and vacuum boundaries and the structure of interfaces in multilayer systems. Within the DWBA approach
the spectra of X-ray scattering were calculated in different experimental geometries. Taken into
account that the diffuse scattering contribution exists even in the specular scattering experimental
data. This off specular input results from the finite size of the detector receiving slit. The
calculations were provided for different possible sources of interface roughness. Namely, the geometric
roughness, intermixing atoms through a flat boundary of the neighboring layers and the simultaneous
presence of geometric interface roughness and intermixing of atoms. The parameters that define the
structure of the interfaces are the rms roughness amplitude, in-and out-of-plane structural correlation
lengths and intensity of intermixing of atoms at the interface. It was also calculated the X-ray
diffraction from laterally structured surfaces. The results are compared with experimental data.